Full course description
Mostly online, with up to 3 required in-person lab sessions (about 4.5 in person hours total). For students age 18 and over, in person lab sessions will take at the Kent State University AMLCI cleanroom located on the Kent Campus. Students under age 18 will complete their in person session at an alternative location to be provided by the instructor.
After the course completion, students will be able to:
• Explain how the sand transforms to silicon.
• Describe the steps of silicon wafer cleaning.
• Explain CMOS fabrication process flow.
• Pattern a wafer with circuit design using photolithography process
• Explain the need for etching process and apply the technique on the patterned wafer.
• Work in a cleanroom environment with Personal Protective Equipment.
• Characterize a patterned wafer